Fabrication tools

  • LTM proprietary tools

cluster gra 200mm
AMAT 200mm plasma etcher

Contact: Camille Petit-Etienne

cluster gra 300mm
AMAT 300mm plasma etcher 

Contact: Camille Petit-Etienne

ObtucatEitre6 Obducat tool

Contact: Marie Panabière

depot mocvd

MOCVD III-V

Contact: Thierry Baron

  • Collaborative platform PTA:

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 Nanos