Characterization tools – IMPACT Platform

  • IMPACT cluster: (contact – Bernard Pelissier)
    In-situ Materials, Processes and Architectures Characterization and Test




FIB-STEM Helios 450S


SEM FEG Jeol JSM -7500 F: low voltage operation suitable for insulating materials observation (polymers, photoresists)


Horiba Jobin-Yvon UVISEL Spectroscopic ellipsometer


TA Q1000- DSC with photocalorimetry accessory



  • Drop contact angle measurements: (contact – Jumana Boussey)
    DSA 100 Kruss with orientable table and  TC40 environment controlled chamber



  • Prober for electrical characterisation (contact: Partice Gonon)