Characterization tools – IMPACT Platform

  • IMPACT cluster: (contact – Bernard Pelissier)
    In-situ Materials, Processes and Architectures Characterization and Test

 

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FIB-STEM Helios 450S

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SEM FEG Jeol JSM -7500 F: low voltage operation suitable for insulating materials observation (polymers, photoresists)

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Horiba Jobin-Yvon UVISEL Spectroscopic ellipsometer

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TA Q1000- DSC with photocalorimetry accessory

 

 

  • Drop contact angle measurements: (contact – Jumana Boussey)
    DSA 100 Kruss with orientable table and  TC40 environment controlled chamber

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  • Prober for electrical characterisation (contact: Partice Gonon)