Associate professor
TeamPlasma etching
Phone+33 (0)4 38 78 56 59
17, Avenue des Martyrs
38054 Grenoble Cedex 9



Martin Kogelschatz obtained his PhD from Université Joseph Fourier Grenoble (UJF)
on plasma etching for microelectronics in 2004.
He then worked as a postdoctoral
fellow at the Swiss Federal Institute of Technology in Lausanne (EPFL, Switzerland)
on the deposition of wear resistant coatings by PEC VD until his recruitment as an
assistant professor in 2005 at UJF-Grenoble where he teaches electronics and
performs research on electrical characterization at nanoscale using scanning probe
microscopy (TUNA, EFM, KFM…) in the Laboratory of Microelectronic Technologies
M. Kogelschatz is author or co-author of more than 20 international journal or
conference papers and has co-authored 2 book chapters.

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